Invention Grant
- Patent Title: Semiconductor device formed by a replacement gate approach based on an early work function metal
- Patent Title (中): 基于早期功能金属的替代门法形成的半导体器件
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Application No.: US12914234Application Date: 2010-10-28
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Publication No.: US08383500B2Publication Date: 2013-02-26
- Inventor: Gerd Marxsen , Joachim Metzger , Robert Binder , Markus Lenski
- Applicant: Gerd Marxsen , Joachim Metzger , Robert Binder , Markus Lenski
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Williams, Morgan & Amerson, P.C.
- Priority: DE102010001406 20100129
- Main IPC: H01L21/3205
- IPC: H01L21/3205

Abstract:
In a replacement gate approach, one work function metal may be provided in an early manufacturing stage, i.e., upon depositing the gate layer stack, thereby reducing the number of deposition steps required in a later manufacturing stage. Consequently, the further work function metal and the electrode metal may be filled into the gate trenches on the basis of superior process conditions compared to conventional replacement gate approaches.
Public/Granted literature
- US20110186931A1 SEMICONDUCTOR DEVICE FORMED BY A REPLACEMENT GATE APPROACH BASED ON AN EARLY WORK FUNCTION METAL Public/Granted day:2011-08-04
Information query
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