Invention Grant
- Patent Title: Exhaust pressure detector
- Patent Title (中): 排气压力检测器
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Application No.: US13087973Application Date: 2011-04-15
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Publication No.: US08383428B2Publication Date: 2013-02-26
- Inventor: Seung Yong Lee
- Applicant: Seung Yong Lee
- Applicant Address: KR Hwaseong-si, Gyeonggi-do
- Assignee: J-Solution Co., Ltd.
- Current Assignee: J-Solution Co., Ltd.
- Current Assignee Address: KR Hwaseong-si, Gyeonggi-do
- Agency: Sherr & Jiang, PLLC
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
An exhaust pressure measuring device including a connection pipe connected to a middle of an exhaust line for carrying byproduct gas, the connection pipe having an opening formed in a middle of a body thereof; a chamber provided at an outer side of the connection pipe and communicating with an inside of the connection pipe through the opening, the chamber having a nitrogen supply line connected thereto, the nitrogen supply line allowing nitrogen gas to be supplied from the outside; and a pressure sensor installed to the chamber to measure pressure in the chamber, whereby a change of exhaust pressure in the exhaust line is measured from the measured pressure in the chamber.
Public/Granted literature
- US20120260724A1 EXHAUST PRESSURE DETECTOR Public/Granted day:2012-10-18
Information query
IPC分类: