Invention Grant
- Patent Title: Acid-sensitive, developer-soluble bottom anti-reflective coatings
- Patent Title (中): 酸敏感,显影剂可溶的底部抗反射涂层
-
Application No.: US12708630Application Date: 2010-02-19
-
Publication No.: US08383318B2Publication Date: 2013-02-26
- Inventor: Jim D. Meador , Joyce A. Lowes , Ramil-Marcelo L. Mercado
- Applicant: Jim D. Meador , Joyce A. Lowes , Ramil-Marcelo L. Mercado
- Applicant Address: US MO Rolla
- Assignee: Brewer Science Inc.
- Current Assignee: Brewer Science Inc.
- Current Assignee Address: US MO Rolla
- Agency: Hovey Williams LLP
- Main IPC: G03F7/00
- IPC: G03F7/00 ; G03F7/004 ; G03F7/028 ; G03F7/095

Abstract:
Acid-sensitive, developer-soluble bottom anti-reflective coating compositions are provided, along with methods of using such compositions and microelectronic structures formed thereof. The compositions preferably comprise a crosslinkable polymer dissolved or dispersed in a solvent system. The polymer preferably comprises recurring monomeric units having adamantyl groups. The compositions also preferably comprise a crosslinker, such as a vinyl ether crosslinking agent, dispersed or dissolved in the solvent system with the polymer. In some embodiments, the composition can also comprise a photoacid generator (PAG) and/or a quencher. The bottom anti-reflective coating compositions are thermally crosslinkable, but can be decrosslinked in the presence of an acid to be rendered developer soluble.
Public/Granted literature
- US20100213580A1 ACID-SENSITIVE, DEVELOPER-SOLUBLE BOTTOM ANTI-REFLECTIVE COATINGS Public/Granted day:2010-08-26
Information query