Invention Grant
US08383057B2 Probe array substrate and method for producing the same, and probe array and method for producing the same 有权
探针阵列基板及其制造方法,探针阵列及其制造方法

Probe array substrate and method for producing the same, and probe array and method for producing the same
Abstract:
A probe array substrate suitable for forming a probe array that has high packing density, that can hold sufficient amounts of probe molecules, and that has little variation in the amounts of probe molecules. A plurality of arrayed probe-holding portions are defined by recesses, and isolating grooves are formed between the adjacent probe-holding portions to prevent probe solutions introduced into the probe-holding portions from spreading to adjacent probe-holding portions. Inner surfaces of the probe-holding portions are made hydrophilic, whereas inner surfaces of the isolating grooves are made hydrophobic. Liquid-introducing protrusions are formed in the probe-holding portions.
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