Invention Grant
- Patent Title: Sputtering system
- Patent Title (中): 溅射系统
-
Application No.: US12825285Application Date: 2010-06-28
-
Publication No.: US08382966B2Publication Date: 2013-02-26
- Inventor: Seung-Ho Choi , Suk-Won Jung , Young-Mook Choi , Hyun-Keun Song
- Applicant: Seung-Ho Choi , Suk-Won Jung , Young-Mook Choi , Hyun-Keun Song
- Applicant Address: KR
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR
- Agency: Knobbe Martens Olson & Bear LLP
- Priority: KR10-2010-0002243 20100111
- Main IPC: C23C14/35
- IPC: C23C14/35

Abstract:
A sputtering system is disclosed. The sputtering system includes: a first sputter unit including: a first deposition material plate, a second deposition material plate, where the first and second deposition material plates face each other, and a first magnetic field generator disposed behind each of the first deposition material plate and the second deposition material plate, configured to generate a magnetic field, a second sputter unit including: a third deposition material plate, disposed next to the first deposition material plate, a fourth deposition material plate, disposed next to the second deposition plate, where the third and fourth deposition material plates face each other, and a second magnetic field generator disposed behind each of the third deposition material plate and the fourth deposition material plate, configured to generate a magnetic field, a first gas supply pipe disposed between the first and third deposition material plates, configured to discharge gas to the second and fourth deposition material plates, a second gas supply pipe disposed between the second fourth deposition material plates, configured to discharge gas to the first and third deposition material plates, a first substrate support unit, configured to support a first deposition substrate, oriented toward outer edges of the first and second deposition material plates, and a second substrate support unit, configured to support a second deposition substrate, oriented toward outer edges of the third and fourth deposition material plates.
Public/Granted literature
- US20110168553A1 SPUTTERING SYSTEM Public/Granted day:2011-07-14
Information query
IPC分类: