Invention Grant
US08382965B2 Tools and methods for mounting transport rails in a substrate processing system
有权
将输送轨道安装在基板处理系统中的工具和方法
- Patent Title: Tools and methods for mounting transport rails in a substrate processing system
- Patent Title (中): 将输送轨道安装在基板处理系统中的工具和方法
-
Application No.: US12263369Application Date: 2008-10-31
-
Publication No.: US08382965B2Publication Date: 2013-02-26
- Inventor: Stuart Scollay
- Applicant: Stuart Scollay
- Applicant Address: US CA Santa Clara
- Assignee: Intevac, Inc.
- Current Assignee: Intevac, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Nixon Peabody LLP
- Agent Joseph Bach, Esq.
- Main IPC: C23C14/00
- IPC: C23C14/00 ; C25B11/00 ; C25B13/00
Abstract:
Devices and methods for mounting and aligning transport rails to a processing chamber of a substrate processing system are described. An alignment feature is built-in to the transport rail and a corresponding alignment feature is added to the valves separating processing chambers. The alignment feature may be a pin-groove arrangement.
Public/Granted literature
- US20090279990A1 TOOLS AND METHODS FOR MOUNTING TRANSPORT RAILS IN A SUBSTRATE PROCESSING SYSTEM Public/Granted day:2009-11-12
Information query
IPC分类:
