Invention Grant
- Patent Title: Pressure type flow rate control reference and corrosion resistant pressure type flow rate controller used for the same
- Patent Title (中): 压力式流量控制参考和耐腐蚀压力式流量控制器用于相同
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Application No.: US13483159Application Date: 2012-05-30
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Publication No.: US08381755B2Publication Date: 2013-02-26
- Inventor: Shuji Moriya , Wataru Okase , Tsutomu Shinohara , Nobukazu Ikeda , Michio Yamaji , Yasutaka Hayashi , Toshihide Yoshida , Yasuyuki Omata
- Applicant: Shuji Moriya , Wataru Okase , Tsutomu Shinohara , Nobukazu Ikeda , Michio Yamaji , Yasutaka Hayashi , Toshihide Yoshida , Yasuyuki Omata
- Applicant Address: JP Osaka JP Tokyo
- Assignee: Fujikin Incorporated,Tokyo Electron Limited
- Current Assignee: Fujikin Incorporated,Tokyo Electron Limited
- Current Assignee Address: JP Osaka JP Tokyo
- Agency: Griffin & Szipl, P.C.
- Priority: JP2007-319977 20071211
- Main IPC: G05D7/06
- IPC: G05D7/06 ; G05D7/00 ; F16K31/12 ; F16K31/02 ; G01F25/00
Abstract:
A pressure type flow rate control reference allows the performance of flow rate calibrations of a flow rate controller on all types of gases, including corrosive gases, at low costs, and also has excellent flow rate control accuracy. The pressure type flow rate control reference includes a pressure controller for adjusting the pressure of a calibration gas from a calibration gas supply source, a first volume provided on the downstream side of a pressure controller, a first connection mouth of an uncalibrated flow rate controller provided on the downstream side of the first volume, a reference pressure type flow rate controller connected to a second connection mouth on the downstream side of the uncalibrated flow rate controller, a second volume provided on the downstream side of a reference pressure type flow rate controller, and an evacuation device provided on the downstream side of the second volume.
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