Invention Grant
- Patent Title: Method and apparatus for extracting ions from an ion source for use in ion implantation
- Patent Title (中): 用于离子注入离子源提取离子的方法和装置
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Application No.: US11648269Application Date: 2006-12-29
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Publication No.: US08368309B2Publication Date: 2013-02-05
- Inventor: Thomas N. Horsky , Robert W. Milgate, III , George P. Sacco, Jr. , Dale Conrad Jacobson , Wade Allen Krull
- Applicant: Thomas N. Horsky , Robert W. Milgate, III , George P. Sacco, Jr. , Dale Conrad Jacobson , Wade Allen Krull
- Applicant Address: US MA North Billerica
- Assignee: SemEquip, Inc.
- Current Assignee: SemEquip, Inc.
- Current Assignee Address: US MA North Billerica
- Agency: Katten Muchin Rosenman LLP
- Agent John S. Paniaguas
- Main IPC: H01J7/24
- IPC: H01J7/24 ; H01J27/00
Abstract:
Thermal control is provided for an extraction electrode of an ion-beam producing system that prevents formation of deposits and unstable operation and enables use with ions produced from condensable vapors and with ion sources capable of cold and hot operation. Electrical heating of the extraction electrode is employed for extracting decaborane or octadecaborane ions. Active cooling during use with a hot ion source prevents electrode destruction, permitting the extraction electrode to be of heat-conductive and fluorine-resistant aluminum composition.
Public/Granted literature
- US20100107980A1 Method and apparatus for extracting ions from an ion source for use in ion implantation Public/Granted day:2010-05-06
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