Invention Grant
- Patent Title: Temperature adjustment method
- Patent Title (中): 温度调节方式
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Application No.: US12224436Application Date: 2007-03-05
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Publication No.: US08367975B2Publication Date: 2013-02-05
- Inventor: Masashi Sugishita , Masaaki Ueno
- Applicant: Masashi Sugishita , Masaaki Ueno
- Applicant Address: JP Tokyo
- Assignee: Hitachi Kokusai Electric Inc.
- Current Assignee: Hitachi Kokusai Electric Inc.
- Current Assignee Address: JP Tokyo
- Agency: Oliff & Berridge, PLC
- Priority: JP2006-063684 20060309
- International Application: PCT/JP2007/054158 WO 20070305
- International Announcement: WO2007/102454 WO 20070913
- Main IPC: B23K10/00
- IPC: B23K10/00

Abstract:
A temperature adjustment method is provided to improve operating efficiency and reduce costs. Control of a heating unit in a thermal processing system including a heating control section is performed based on a first output control pattern obtained by subjecting a detection temperature provided by a first temperature detecting unit to an integral operation, a differential operation, and a proportional operation under a condition of a first set of temperature-setting conditions, a second output control pattern obtained by determining a first heat quantity in a period from the start of an increase in temperature detected by a second temperature detecting unit until the temperature inside the processing chamber reaches a maximum temperature, and using a second heat quantity obtained by subtracting the part of the output provided by the proportional operation from the first heat quantity.
Public/Granted literature
- US20090107978A1 Temperature Adjustment Method Public/Granted day:2009-04-30
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