Invention Grant
- Patent Title: Manufacturing method of flexible semiconductor device
- Patent Title (中): 柔性半导体器件的制造方法
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Application No.: US13054049Application Date: 2010-02-05
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Publication No.: US08367488B2Publication Date: 2013-02-05
- Inventor: Takashi Ichiryu , Seiichi Nakatani , Koichi Hirano
- Applicant: Takashi Ichiryu , Seiichi Nakatani , Koichi Hirano
- Applicant Address: JP Osaka
- Assignee: Panasonic Corporation
- Current Assignee: Panasonic Corporation
- Current Assignee Address: JP Osaka
- Agency: McDermott Will & Emery LLP
- Priority: JP2009-120665 20090519
- International Application: PCT/JP2010/000715 WO 20100205
- International Announcement: WO2010/134234 WO 20101125
- Main IPC: H01L29/786
- IPC: H01L29/786 ; H01L21/336

Abstract:
A method includes the steps of preparing a multilayer film 80 formed by sequentially stacking a first metal layer 10, an inorganic insulating layer 20, a semiconductor layer 30, and a second metal layer 40; forming a source electrode 42s and a drain electrode 42d comprised of the second metal layer 40 by etching the second metal layer 40; pressure-bonding a resin layer 50 onto a surface of the multilayer film 80 provided with the source electrode 42s and the drain electrode 42d to burry the source electrode 42s and the drain electrode 42d in the resin layer 50; and forming a gate electrode 10g comprised of the first metal layer 10 by etching the first metal layer 10. The inorganic insulating layer 20g functions as a gate insulating film. The semiconductor layer 30 functions as a channel.
Public/Granted literature
- US20110121298A1 MANUFACTURING METHOD OF FLEXIBLE SEMICONDUCTOR DEVICE Public/Granted day:2011-05-26
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