Invention Grant
- Patent Title: Shape characterization with elliptic fourier descriptor for contact or any closed structures on the chip
- Patent Title (中): 形状表征与椭圆形的描述符接触或芯片上的任何封闭结构
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Application No.: US12575068Application Date: 2009-10-07
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Publication No.: US08367430B2Publication Date: 2013-02-05
- Inventor: Yuansheng Ma , Harry J. Levinson , Jongwook Kye
- Applicant: Yuansheng Ma , Harry J. Levinson , Jongwook Kye
- Applicant Address: KY Grand Cayman
- Assignee: Globalfoundries, Inc.
- Current Assignee: Globalfoundries, Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Ditthavong Mori & Steiner, P.C.
- Main IPC: H01L21/66
- IPC: H01L21/66
Abstract:
Shapes and orientations of contacts or other closed contours on an integrated circuit are characterized by calculating Elliptic Fourier descriptors. The descriptors are then used for generating design rules for the integrated circuit and for assessing process capability for the manufacturing of the integrated circuit. Monte Carlo simulation can be performed in conjunction with the elliptic Fourier descriptors.
Public/Granted literature
- US20110079779A1 SHAPE CHARACTERIZATION WITH ELLIPTIC FOURIER DESCRIPTOR FOR CONTACT OR ANY CLOSED STRUCTURES ON THE CHIP Public/Granted day:2011-04-07
Information query
IPC分类:
