Invention Grant
- Patent Title: Method of forming temporary carrier structure and associated release techniques
- Patent Title (中): 形成临时载体结构和相关释放技术的方法
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Application No.: US13093672Application Date: 2011-04-25
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Publication No.: US08366852B2Publication Date: 2013-02-05
- Inventor: Kyle Kirby
- Applicant: Kyle Kirby
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Perkins Coie LLP
- Main IPC: B32B37/00
- IPC: B32B37/00

Abstract:
A method of forming a temporary carrier structure is disclosed which includes forming a plurality of recesses in a carrier structure, the recesses extending to a depth that is less than a thickness of the carrier structure, forming a dissolvable material in the recesses and above a first surface of the carrier structure, securing a thin substrate above the first surface of the carrier structure using the dissolvable material to secure the thin substrate in place, performing at least one process operation on a second surface of the carrier structure to expose the dissolvable material in the recesses and contacting the exposed dissolvable material with a release agent so as to dissolve at least a portion of the dissolvable material.
Public/Granted literature
- US20110284152A1 METHOD OF FORMING TEMPORARY CARRIER STRUCTURE AND ASSOCIATED RELEASE TECHNIQUES Public/Granted day:2011-11-24
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