Invention Grant
- Patent Title: Turbo-molecular pump and method of assembling turbo-molecular pump
- Patent Title (中): 涡轮分子泵和组装涡轮分子泵的方法
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Application No.: US11922655Application Date: 2006-06-16
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Publication No.: US08366380B2Publication Date: 2013-02-05
- Inventor: Yoshiyuki Sakaguchi , Tsutomu Takaada
- Applicant: Yoshiyuki Sakaguchi , Tsutomu Takaada
- Applicant Address: JP
- Assignee: Edwards Japan Limited
- Current Assignee: Edwards Japan Limited
- Current Assignee Address: JP
- Agency: Adams & Wilks
- Priority: JP2005-181389 20050622
- International Application: PCT/JP2006/312108 WO 20060616
- International Announcement: WO2006/137333 WO 20061228
- Main IPC: F04D29/32
- IPC: F04D29/32

Abstract:
A turbo-molecular pump has a housing with intake and exhaust ports. A rotary body is enclosed in the housing and has rotor blades of a series of stages formed so that the outside diameter of at least one stage on the exhaust port side is smaller than that on the intake port side. Stator blades are arranged between the rotor blades and spacer rings are arranged between the stator blades to hold the stator blades at predetermined intervals. The spacer rings are formed so that the smallest inside diameter of at least one stage of the spacer rings on the exhaust port side is smaller than the largest outside diameter of the rotor blades. The housing comprises a casing whose inside diameter is constant or whose inside diameter is smaller at the intake port side than at the exhaust port side.
Public/Granted literature
- US20090116959A1 Turbo-Molecular Pump and Method of Assembling Turbo-Molecular Pump Public/Granted day:2009-05-07
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