Invention Grant
US08260024B2 Systems and methods for measuring surface shape 有权
用于测量表面形状的系统和方法

Systems and methods for measuring surface shape
Abstract:
A system for determining a surface shape of a test object includes a pattern having a plurality of first elements dispose about a central axis and defining an aperture containing the central axis. The first elements includes a plurality of common elements having a common form and a reference element having a reference form that is different than the common form. The system further comprises a detector array and an optical system. The optical system is adapted to provide an image of the first elements when light reflects off a surface of a test object, passes through the aperture, and is received by the detector array. The reference form may be configured to facilitate an association between the common elements and the spot images of the common elements.
Public/Granted literature
Information query
Patent Agency Ranking
0/0