Invention Grant
- Patent Title: Initiating laser-sustained plasma
- Patent Title (中): 启动激光持续血浆
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Application No.: US12839332Application Date: 2010-07-19
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Publication No.: US08259771B1Publication Date: 2012-09-04
- Inventor: Anatoly Shchemelinin , Ilya Bezel , Matthew W. Derstine
- Applicant: Anatoly Shchemelinin , Ilya Bezel , Matthew W. Derstine
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Luedeka Neely Group, P.C.
- Main IPC: H01S3/223
- IPC: H01S3/223 ; H01S3/091

Abstract:
A laser-sustained plasma light source with a bulb for enclosing a relatively cool gas environment, and an electrode disposed at least partially within the gas environment. A power supply applies a potential to the electrode, where the power supply is sufficient to create a corona discharge at the electrode within the gas environment, and the power supply is not sufficient to produce an arc discharge within the gas environment. The corona discharge thereby produces a relatively heated gas environment. A pump laser source focuses a laser beam within the gas environment, where the laser beam is sufficient to ignite a plasma in the relatively heated gas environment, but is not sufficient to ignite a plasma in the relatively cool gas environment.
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