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US08258590B2 Method for the production of a component, and component 失效
用于生产组件和组件的方法

  • Patent Title: Method for the production of a component, and component
  • Patent Title (中): 用于生产组件和组件的方法
  • Application No.: US12451942
    Application Date: 2008-03-28
  • Publication No.: US08258590B2
    Publication Date: 2012-09-04
  • Inventor: Wolfram GeigerUwe Breng
  • Applicant: Wolfram GeigerUwe Breng
  • Applicant Address: DE Freiburg
  • Assignee: Northrop Grumman LITEF GmbH
  • Current Assignee: Northrop Grumman LITEF GmbH
  • Current Assignee Address: DE Freiburg
  • Agent Elliott N. Kramsky
  • Priority: DE102007030121 20070629
  • International Application: PCT/EP2008/002503 WO 20080328
  • International Announcement: WO2009/003542 WO 20090108
  • Main IPC: H01L29/84
  • IPC: H01L29/84
Method for the production of a component, and component
Abstract:
A method for producing a component, especially a micromechanical, micro-electro-mechanical or micro-opto-electro-mechanical component, as well as such a component which has an active structure that is embedded in a layer structure. Strip conductor bridges are formed by etching first and second depressions having a first and second, different etching depth into a covering layer of a first layer combination that additionally encompasses a substrate and an insulation layer. The deeper depression is used for insulating the strip conductor bridge while the shallower depression provides a moving space for the active structure with the moving space being bridged by the strip conductor bridge.
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