Invention Grant
- Patent Title: Method for the production of a component, and component
- Patent Title (中): 用于生产组件和组件的方法
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Application No.: US12451942Application Date: 2008-03-28
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Publication No.: US08258590B2Publication Date: 2012-09-04
- Inventor: Wolfram Geiger , Uwe Breng
- Applicant: Wolfram Geiger , Uwe Breng
- Applicant Address: DE Freiburg
- Assignee: Northrop Grumman LITEF GmbH
- Current Assignee: Northrop Grumman LITEF GmbH
- Current Assignee Address: DE Freiburg
- Agent Elliott N. Kramsky
- Priority: DE102007030121 20070629
- International Application: PCT/EP2008/002503 WO 20080328
- International Announcement: WO2009/003542 WO 20090108
- Main IPC: H01L29/84
- IPC: H01L29/84

Abstract:
A method for producing a component, especially a micromechanical, micro-electro-mechanical or micro-opto-electro-mechanical component, as well as such a component which has an active structure that is embedded in a layer structure. Strip conductor bridges are formed by etching first and second depressions having a first and second, different etching depth into a covering layer of a first layer combination that additionally encompasses a substrate and an insulation layer. The deeper depression is used for insulating the strip conductor bridge while the shallower depression provides a moving space for the active structure with the moving space being bridged by the strip conductor bridge.
Public/Granted literature
- US20100117166A1 METHOD FOR THE PRODUCTION OF A COMPONENT, AND COMPONENT Public/Granted day:2010-05-13
Information query
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