Invention Grant
- Patent Title: Method and apparatus for rapid preparation of multiple specimens for transmission electron microscopy
- Patent Title (中): 用于透射电子显微镜快速制备多个样品的方法和装置
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Application No.: US13050561Application Date: 2011-03-17
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Publication No.: US08258473B2Publication Date: 2012-09-04
- Inventor: Frederick F. Shaapur , Roger J. Graham
- Applicant: Frederick F. Shaapur , Roger J. Graham
- Applicant Address: US AZ Scottsdale
- Assignee: Nanotem, Inc.
- Current Assignee: Nanotem, Inc.
- Current Assignee Address: US AZ Scottsdale
- Agency: Brown & Michaels, PC
- Main IPC: H01J37/244
- IPC: H01J37/244 ; H01J37/20
Abstract:
A method and apparatus for in-situ lift-out rapid preparation of TEM samples. The invention uses adhesives and/or spring-loaded locking-clips in order to place multiple TEM-ready sample membranes on a single TEM support grid and eliminates the use of standard FIB-assisted metal deposition as a bonding scheme. Therefore, the invention circumvents the problem of sputtering from metal deposition steps and also increases overall productivity by allowing for multiple samples to be produced without opening the FIB/SEM vacuum chamber.
Public/Granted literature
- US20120119084A1 Method and Apparatus for Rapid Preparation of Multiple Specimens for Transmission Electron Microscopy Public/Granted day:2012-05-17
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