Invention Grant
US08258010B2 Making a semiconductor device having conductive through organic vias
有权
通过有机通孔制造具有导电性的半导体器件的方法
- Patent Title: Making a semiconductor device having conductive through organic vias
- Patent Title (中): 通过有机通孔制造具有导电性的半导体器件的方法
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Application No.: US12406038Application Date: 2009-03-17
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Publication No.: US08258010B2Publication Date: 2012-09-04
- Inventor: Reza A. Pagaila , Byung Tai Do , Shuangwu Huang
- Applicant: Reza A. Pagaila , Byung Tai Do , Shuangwu Huang
- Applicant Address: SG Singapore
- Assignee: STATS ChipPAC, Ltd.
- Current Assignee: STATS ChipPAC, Ltd.
- Current Assignee Address: SG Singapore
- Agency: Patent Law Group: Atkins & Associates, P.C.
- Agent Robert D. Atkins
- Main IPC: H01L21/50
- IPC: H01L21/50

Abstract:
A plurality of semiconductor die is mounted to a carrier separated by a peripheral region. An insulating material is deposited in the peripheral region. A first opening is formed in the insulating material of the peripheral region to a first depth. A second opening is formed in the insulating material of the peripheral region centered over the first opening to a second depth less than the first depth. The first and second openings constitute a composite through organic via (TOV) having a first width in a vertical region of the first opening and a second width in a vertical region of the second opening. The second width is different than the first width. A conductive material is deposited in the composite TOV to form a conductive TOV. An organic solderability preservative (OSP) coating is formed over a contact surface of the conductive TOV.
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