Invention Grant
- Patent Title: Process for manufacturing shell membrane force and deflection sensor
- Patent Title (中): 制造壳膜力和偏转传感器的工艺
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Application No.: US13042168Application Date: 2011-03-07
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Publication No.: US08257991B1Publication Date: 2012-09-04
- Inventor: Yong-Lae Park , Behzad Moslehi , Richard James Black , Mark R. Cutkosky , Kelvin K. Chau
- Applicant: Yong-Lae Park , Behzad Moslehi , Richard James Black , Mark R. Cutkosky , Kelvin K. Chau
- Applicant Address: US CA Santa Clara
- Assignee: Intelligent Fiber Optic Systems, Inc.
- Current Assignee: Intelligent Fiber Optic Systems, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: File-EE-Patents.com
- Agent Jay A. Chesavage
- Main IPC: H01L21/00
- IPC: H01L21/00 ; G02B6/00 ; G01J1/04 ; G01L19/04
Abstract:
A sensor for force is formed from an elastomeric cylinder having a region with apertures. The apertures have passageways formed between them, and an optical fiber is introduced into these passageways, where the optical fiber has a grating for measurement of tension positioned in the passageways between apertures. Optionally, a temperature measurement sensor is placed in or around the elastomer for temperature correction, and if required, a copper film may be deposited in the elastomer for reduced sensitivity to spot temperature variations in the elastomer near the sensors.
Information query
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