Invention Grant
US08256912B2 High positioning reproducible low torque mirror-actuator interface
有权
高定位可重复的低扭矩镜面致动器接口
- Patent Title: High positioning reproducible low torque mirror-actuator interface
- Patent Title (中): 高定位可重复的低扭矩镜面致动器接口
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Application No.: US13074759Application Date: 2011-03-29
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Publication No.: US08256912B2Publication Date: 2012-09-04
- Inventor: Herman M. J. R. Soemers , Franciskus Hendrikus van Deuren , Hendrik Dirk Visser , Sander C. Broers
- Applicant: Herman M. J. R. Soemers , Franciskus Hendrikus van Deuren , Hendrik Dirk Visser , Sander C. Broers
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Main IPC: G02B7/00
- IPC: G02B7/00

Abstract:
The present high positioning reproducible mirror-actuator interface disclosed herein overcomes the deficiencies associated with conventional interface systems and offer a number of advantages that are disclosed herein. Generally, the mirror mounts provide a reliable and robust interface between the mirrors and actuators, that serve to move and position the mirrors, as wells as providing an interface between the mirrors and gravity compensator pins. The mirror mount is characterized as having a body that has an outer peripheral wall that includes a plurality of flexible elements around the perimeter of the body, each having a high stiffness in plane and a high flexibility out of plane. The body is open at the first end to allow flexing of the flexible elements. The flexible elements providing a direct coupling interface between the mirror mount and the mirror. The flexible elements of the mirror mount provides a number of advantages and increases the performance capabilities of the first mechanical interface between the mirror mount and the actuator.
Public/Granted literature
- US20110176234A1 HIGH POSITIONING REPRODUCIBLE LOW TORQUE MIRROR - ACTUATOR INTERFACE Public/Granted day:2011-07-21
Information query
IPC分类:
G | 物理 |
G02 | 光学 |
G02B | 光学元件、系统或仪器 |
G02B7/00 | 光学元件的安装、调整装置或不漏光连接 |