Invention Grant
US08238645B2 Inspection system and a method for detecting defects based upon a reference frame 有权
检查系统和基于参考系检测缺陷的方法

  • Patent Title: Inspection system and a method for detecting defects based upon a reference frame
  • Patent Title (中): 检查系统和基于参考系检测缺陷的方法
  • Application No.: US12064358
    Application Date: 2006-08-29
  • Publication No.: US08238645B2
    Publication Date: 2012-08-07
  • Inventor: Yuri PostolovMenachem Regensburger
  • Applicant: Yuri PostolovMenachem Regensburger
  • Applicant Address: IL Migdal Haemek
  • Assignee: Camtek Ltd.
  • Current Assignee: Camtek Ltd.
  • Current Assignee Address: IL Migdal Haemek
  • Agency: Reches Patents
  • International Application: PCT/IL2006/000994 WO 20060829
  • International Announcement: WO2007/026349 WO 20070308
  • Main IPC: G06K9/00
  • IPC: G06K9/00
Inspection system and a method for detecting defects based upon a reference frame
Abstract:
A method for inspecting objects and an inspection system, the system includes: an image acquisition unit adapted to acquire multiple images, according to a predefined image acquisition scheme, of multiple portions of a diced wafer that comprises multiple dice; and a processor adapted to locate multiple unique features within the multiple images, at least partially during the acquisition of images; associate multiple unique features with multiple dice, at least partially during the location of multiple unique features; determine multiple transformations between multiple die coordinate systems and a global coordinate system, in response to a locations of unique features and their associations with multiple dice, at least partially during an association between multiple unique features with multiple dice; and detect defects in response to a comparison between dice and corresponding reference dice, in response to the transformations, at least partially during the determination of the multiple transformations.
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