Invention Grant
- Patent Title: Inspection system and a method for detecting defects based upon a reference frame
- Patent Title (中): 检查系统和基于参考系检测缺陷的方法
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Application No.: US12064358Application Date: 2006-08-29
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Publication No.: US08238645B2Publication Date: 2012-08-07
- Inventor: Yuri Postolov , Menachem Regensburger
- Applicant: Yuri Postolov , Menachem Regensburger
- Applicant Address: IL Migdal Haemek
- Assignee: Camtek Ltd.
- Current Assignee: Camtek Ltd.
- Current Assignee Address: IL Migdal Haemek
- Agency: Reches Patents
- International Application: PCT/IL2006/000994 WO 20060829
- International Announcement: WO2007/026349 WO 20070308
- Main IPC: G06K9/00
- IPC: G06K9/00

Abstract:
A method for inspecting objects and an inspection system, the system includes: an image acquisition unit adapted to acquire multiple images, according to a predefined image acquisition scheme, of multiple portions of a diced wafer that comprises multiple dice; and a processor adapted to locate multiple unique features within the multiple images, at least partially during the acquisition of images; associate multiple unique features with multiple dice, at least partially during the location of multiple unique features; determine multiple transformations between multiple die coordinate systems and a global coordinate system, in response to a locations of unique features and their associations with multiple dice, at least partially during an association between multiple unique features with multiple dice; and detect defects in response to a comparison between dice and corresponding reference dice, in response to the transformations, at least partially during the determination of the multiple transformations.
Public/Granted literature
- US20090110260A1 Inspection System and a Method for Detecting Defects Based Upon a Reference Frame Public/Granted day:2009-04-30
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