Invention Grant
US08237919B2 Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, and device manufacturing method for continuous position measurement of movable body before and after switching between sensor heads
有权
可移动体驱动方法和移动体驱动系统，图案形成方法和装置，曝光方法和装置以及用于在传感器头之间切换之前和之后的可移动体的连续位置测量的装置制造方法
- Patent Title: Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, and device manufacturing method for continuous position measurement of movable body before and after switching between sensor heads
- Patent Title (中): 可移动体驱动方法和移动体驱动系统，图案形成方法和装置，曝光方法和装置以及用于在传感器头之间切换之前和之后的可移动体的连续位置测量的装置制造方法
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Application No.: US12196133Application Date: 2008-08-21
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Publication No.: US08237919B2Publication Date: 2012-08-07
- Inventor: Yuichi Shibazaki , Yuho Kanaya
- Applicant: Yuichi Shibazaki , Yuho Kanaya
- Applicant Address: JP Tokyo
- Assignee: Nikon Corporation
- Current Assignee: Nikon Corporation
- Current Assignee Address: JP Tokyo
- Agency: Oliff & Berridge, PLC
- Main IPC: G03B27/58
- IPC: G03B27/58
Abstract:
A controller uses two Z heads, which are positioned above a reflection surface installed on the ±X ends of the upper surface of a table, to measure the height and tilt of the table. According to the XY position of the table, the Z heads to be used are switched from ZsR and ZsL to ZsR′ and ZsL. On the switching of the heads, the controller applies a coordinate linkage method to set an initial value of the Z heads which are to be newly used. Accordingly, although the Z heads to be used are sequentially switched according to the XY position of the table, measurement results of the height and the tilt of the table are stored before and after the switching, and it becomes possible to drive the table with high precision.
Public/Granted literature
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