Invention Grant
- Patent Title: Method for improving an optical imaging property of a projection objective of a microlithographic projection exposure apparatus
- Patent Title (中): 一种用于改善微光刻投影曝光装置的投影物镜的光学成像特性的方法
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Application No.: US12203738Application Date: 2008-09-03
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Publication No.: US08237915B2Publication Date: 2012-08-07
- Inventor: Paul Graeupner
- Applicant: Paul Graeupner
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Priority: DE10257766 20021210
- Main IPC: G03B27/42
- IPC: G03B27/42 ; G03B27/52 ; G03B27/32 ; G03B27/68 ; G03B27/54 ; G03B27/58

Abstract:
A method is disclosed for improving an optical imaging property, for example spherical aberration or the focal length, of a projection objective of a microlithographic projection exposure apparatus. First, an immersion liquid is introduced into an interspace between a photosensitive surface and an end face of the projection objective. Then an imaging property of the projection objective is determined, for example using an interferometer or a CCD sensor arranged in an image plane of the projection objective. This imaging property is compared with a target imaging property. Finally, the temperature of the immersion liquid is changed until the determined imaging property is as close as possible to the target imaging property.
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