Invention Grant
US08237912B2 Liquid filled lens element, lithographic apparatus comprising such an element and device manufacturing method
有权
液体填充透镜元件，包括这种元件的光刻设备和器件制造方法
- Patent Title: Liquid filled lens element, lithographic apparatus comprising such an element and device manufacturing method
- Patent Title (中): 液体填充透镜元件，包括这种元件的光刻设备和器件制造方法
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Application No.: US13043192Application Date: 2011-03-08
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Publication No.: US08237912B2Publication Date: 2012-08-07
- Inventor: Herman Boom , Borgert Kruizinga , Martinus Hendrikus Antonius Leenders , Johannes Catharinus Hubertus Mulkens , Huibert Visser , Peter Julian Pollard
- Applicant: Herman Boom , Borgert Kruizinga , Martinus Hendrikus Antonius Leenders , Johannes Catharinus Hubertus Mulkens , Huibert Visser , Peter Julian Pollard
- Applicant Address: NL Veldhoven
- Assignee: ASML Netherlands B.V.
- Current Assignee: ASML Netherlands B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Pillsbury Winthrop Shaw Pittman LLP
- Main IPC: G03B27/52
- IPC: G03B27/52
Abstract:
A lens element, for use in a projection system, includes a concave side. The lens element further includes a membrane and a nozzle, the membrane at least covering the concave side of the lens element. The nozzle is arranged for supplying and/or removing a liquid and/or a gas in between the concave side and the membrane.
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