Invention Grant
- Patent Title: Two-axis magnetic field sensor with multiple pinning directions
- Patent Title (中): 具有多个钉扎方向的双轴磁场传感器
-
Application No.: US13023260Application Date: 2011-02-08
-
Publication No.: US08237437B2Publication Date: 2012-08-07
- Inventor: Bradley N Engel , Phillip G. Mather , Jon M. Slaughter
- Applicant: Bradley N Engel , Phillip G. Mather , Jon M. Slaughter
- Applicant Address: US AZ Chandler
- Assignee: Everspin Technologies, Inc.
- Current Assignee: Everspin Technologies, Inc.
- Current Assignee Address: US AZ Chandler
- Agency: Ingrassia Fischer & Lorenz, P.C.
- Main IPC: G01R33/09
- IPC: G01R33/09 ; G01R33/02

Abstract:
A fabrication process and apparatus provide a high-performance magnetic field sensor (200) from two differential sensor configurations (201, 211) which require only two distinct pinning axes (206, 216) which are formed from a single reference layer (60) that is etched into high aspect ratio shapes (62, 63) with their long axes drawn with different orientations so that, upon treating the reference layers with a properly aligned saturating field (90) and then removing the saturating field, the high aspect ratio patterns provide a shape anisotropy that forces the magnetization of each patterned shape (62, 63) to relax along its respective desired axis. Upon heating and cooling, the ferromagnetic film is pinned in the different desired directions.
Public/Granted literature
- US20110121826A1 Two-Axis Magnetic Field Sensor with Multiple Pinning Directions Public/Granted day:2011-05-26
Information query