Invention Grant
US08237233B2 Field effect transistor having a gate structure with a first section above a center portion of the channel region and having a first effective work function and second sections above edges of the channel region and having a second effective work function
有权
场效应晶体管具有栅极结构,其具有在沟道区域的中心部分上方的第一部分并且具有第一有效功函数和在沟道区域的边缘上方的第二部分,并且具有第二有效功函数
- Patent Title: Field effect transistor having a gate structure with a first section above a center portion of the channel region and having a first effective work function and second sections above edges of the channel region and having a second effective work function
- Patent Title (中): 场效应晶体管具有栅极结构,其具有在沟道区域的中心部分上方的第一部分并且具有第一有效功函数和在沟道区域的边缘上方的第二部分,并且具有第二有效功函数
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Application No.: US12194039Application Date: 2008-08-19
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Publication No.: US08237233B2Publication Date: 2012-08-07
- Inventor: Brent A. Anderson , Edward J. Nowak
- Applicant: Brent A. Anderson , Edward J. Nowak
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Gibb & Riley, LLC
- Agent Richard M. Kotulak, Esq.
- Main IPC: H01L29/51
- IPC: H01L29/51 ; H01L29/78

Abstract:
In view of the foregoing, disclosed herein are embodiments of an improved field effect transistor (FET) structure and a method of forming the structure. The FET structure embodiments each incorporate a unique gate structure. Specifically, this gate structure has a first section above a center portion of the FET channel region and second sections above the channel width edges (i.e., above the interfaces between the channel region and adjacent isolation regions). The first and second sections differ (i.e., they have different gate dielectric layers and/or different gate conductor layers) such that they have different effective work functions (i.e., a first and second effective work-function, respectively). The different effective work functions are selected to ensure that the threshold voltage at the channel width edges is elevated.
Public/Granted literature
- US20100044801A1 DUAL METAL GATE CORNER Public/Granted day:2010-02-25
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