Invention Grant
US08237170B2 Schottky diamond semiconductor device and manufacturing method for a Schottky electrode for diamond semiconductor device
有权
肖特基金刚石半导体器件及用于金刚石半导体器件的肖特基电极的制造方法
- Patent Title: Schottky diamond semiconductor device and manufacturing method for a Schottky electrode for diamond semiconductor device
- Patent Title (中): 肖特基金刚石半导体器件及用于金刚石半导体器件的肖特基电极的制造方法
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Application No.: US12597578Application Date: 2008-04-14
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Publication No.: US08237170B2Publication Date: 2012-08-07
- Inventor: Kazuhiro Ikeda , Hitoshi Umezawa , Shinichi Shikata
- Applicant: Kazuhiro Ikeda , Hitoshi Umezawa , Shinichi Shikata
- Applicant Address: JP
- Assignee: National Institute of Advanced Industrial Science and Technology
- Current Assignee: National Institute of Advanced Industrial Science and Technology
- Current Assignee Address: JP
- Agency: Ostrolenk Faber LLP
- Priority: JP2007-117815 20070427; JP2007-117823 20070427
- International Application: PCT/JP2008/057283 WO 20080414
- International Announcement: WO2008/136259 WO 20081113
- Main IPC: H01L29/15
- IPC: H01L29/15

Abstract:
To provide a Schottky electrode in a diamond semiconductor, which has a good adhesion properties to diamonds, has a contacting surface which does not become peeled due to an irregularity in an external mechanical pressure, does not cause a reduction in yield in a diode forming process and does not cause deterioration in current-voltage characteristics, and a method of manufacturing the Schottky electrode.A Schottky electrode which includes: scattered island-form pattern Pt-group alloy thin films which are formed on a diamond surface formed on a substrate, in which the Pt-group alloy includes 50 to 99.9 mass % of Pt and 0.1 to 50 mass % of Ru and/or Ir, or which includes electrodes in a scattered island pattern, including: scattered island-form pattern metal thin films which are formed on a diamond surface formed on a substrate and include one selected from Pt and Pd; and metal thin films which include one selected from Ru, Ir and Rh and are provided on all of the metal thin films which include one selected from Pt and Pd, and a method of manufacturing the Schottky electrode.
Public/Granted literature
- US20100117098A1 SCHOTTKY ELECTRODE FOR DIAMOND SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF Public/Granted day:2010-05-13
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