Invention Grant
US08237119B2 Scanning type charged particle beam microscope and an image processing method using the same 有权
扫描型带电粒子束显微镜及其使用的图像处理方法

Scanning type charged particle beam microscope and an image processing method using the same
Abstract:
Design data and sample characteristic information corresponding to individual areas on the design data are used to perform an image quality improvement operation to make appropriate improvements on image quality according to sample characteristic corresponding to the individual areas on the image, allowing a high speed area division on the image. Further, the use of a database that stores image information associated with the design data allows for an image quality improvement operation that automatically emphasizes portions of the image that greatly differ from past images of the similar design data.
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