Invention Grant
- Patent Title: Scanning type charged particle beam microscope and an image processing method using the same
- Patent Title (中): 扫描型带电粒子束显微镜及其使用的图像处理方法
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Application No.: US12414759Application Date: 2009-03-31
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Publication No.: US08237119B2Publication Date: 2012-08-07
- Inventor: Kenji Nakahira , Atsushi Miyamoto
- Applicant: Kenji Nakahira , Atsushi Miyamoto
- Applicant Address: JP Tokyo
- Assignee: Hitachi High-Technologies Corporation
- Current Assignee: Hitachi High-Technologies Corporation
- Current Assignee Address: JP Tokyo
- Agency: Antonelli, Terry, Stout & Kraus, LLP.
- Priority: JP2008-089133 20080331
- Main IPC: G21N23/00
- IPC: G21N23/00 ; G21K7/00

Abstract:
Design data and sample characteristic information corresponding to individual areas on the design data are used to perform an image quality improvement operation to make appropriate improvements on image quality according to sample characteristic corresponding to the individual areas on the image, allowing a high speed area division on the image. Further, the use of a database that stores image information associated with the design data allows for an image quality improvement operation that automatically emphasizes portions of the image that greatly differ from past images of the similar design data.
Public/Granted literature
- US20090266985A1 Scanning Type Charged Particle Beam Microscope and an Image Processing Method Using the Same Public/Granted day:2009-10-29
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