Invention Grant
- Patent Title: Deposition of viscous material
- Patent Title (中): 沉积粘性物质
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Application No.: US12843123Application Date: 2010-07-26
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Publication No.: US08236705B2Publication Date: 2012-08-07
- Inventor: Nitin H. Parbhoo , Spyridon Skordas
- Applicant: Nitin H. Parbhoo , Spyridon Skordas
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Hoffman Warnick LLC
- Agent Catherine Ivers
- Main IPC: H01L21/469
- IPC: H01L21/469

Abstract:
Embodiments of the invention provide methods and systems for depositing a viscous material on a substrate surface. In one embodiment, the invention provides a method of depositing a viscous material on a substrate surface, the method comprising: applying a pre-wet material to a surface of a substrate; depositing a viscous material atop the pre-wet material; rotating the substrate about an axis to spread the viscous material along the surface of the substrate toward a substrate edge; and depositing additional pre-wet material in a path along the surface and adjacent the spreading viscous material.
Public/Granted literature
- US20120021609A1 DEPOSITION OF VISCOUS MATERIAL Public/Granted day:2012-01-26
Information query
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