Invention Grant
- Patent Title: Method for forming non-aligned microcavities of different depths
- Patent Title (中): 用于形成不同深度的不对齐微腔的方法
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Application No.: US12519356Application Date: 2007-12-20
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Publication No.: US08236698B2Publication Date: 2012-08-07
- Inventor: Jean-Charles Barbe , Erwan Dornel , François De Crecy , Joël Eymery
- Applicant: Jean-Charles Barbe , Erwan Dornel , François De Crecy , Joël Eymery
- Applicant Address: FR Paris
- Assignee: Commissariat a l'Energie Atomique
- Current Assignee: Commissariat a l'Energie Atomique
- Current Assignee Address: FR Paris
- Agency: Nixon Peabody LLP
- Priority: FR0655817 20061221
- International Application: PCT/EP2007/064324 WO 20071220
- International Announcement: WO2008/074861 WO 20080626
- Main IPC: H01L21/311
- IPC: H01L21/311
Abstract:
The invention relates to a method for forming microcavities (118) of different depths in a layer (102) based on at least an amorphous or monocrystalline material, comprising at least the following steps in which: at least one shaft and/or trench is formed in the layer (102) so as to extend through one face (101) thereof, such that two sections of the shaft and/or the trench, in two different planes parallel to the face (101), are aligned in relation to one another along an alignment axis forming a non-zero angle with a normal to the plane of said face (101); and the layer (102) is annealed in a hydrogenated atmosphere so as to transform the shaft and/or trench into at least two microcavities (118).
Public/Granted literature
- US20100230674A1 METHOD FOR FORMING NON-ALIGNED MICROCAVITIES OF DIFFERENT DEPTHS Public/Granted day:2010-09-16
Information query
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