Invention Grant
US08236690B2 Method for fabricating semiconductor package substrate having different thicknesses between wire bonding pad and ball pad
有权
用于制造在引线焊盘和球垫之间具有不同厚度的半导体封装衬底的方法
- Patent Title: Method for fabricating semiconductor package substrate having different thicknesses between wire bonding pad and ball pad
- Patent Title (中): 用于制造在引线焊盘和球垫之间具有不同厚度的半导体封装衬底的方法
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Application No.: US12801723Application Date: 2010-06-22
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Publication No.: US08236690B2Publication Date: 2012-08-07
- Inventor: Kyoung Ro Yoon , Young Hwan Shin , Yoon Su Kim , Tae Gon Lee
- Applicant: Kyoung Ro Yoon , Young Hwan Shin , Yoon Su Kim , Tae Gon Lee
- Applicant Address: KR Suwon
- Assignee: Samsung Electro-Mechanics Co., Ltd.
- Current Assignee: Samsung Electro-Mechanics Co., Ltd.
- Current Assignee Address: KR Suwon
- Priority: KR10-2005-0090019 20050927
- Main IPC: H01L21/44
- IPC: H01L21/44

Abstract:
A method for fabricating a semiconductor package substrate, including: preparing a copper clad laminate and half etching a copper foil on a wire bonding pad side of the copper clad laminate; depositing a first etching resist on the opposite sides of the copper clad laminate; forming circuit patterns on the first etching resist, constructing circuits including a wire bonding pad and a ball pad after the model of the circuit patterns, and removing the first etching resist; applying a solder resist to the copper clad laminate in such a way to expose the wire bonding pad and the ball pad; and plating the wire bonding pad with gold and subjecting the ball pad to surface treatment.
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