Invention Grant
- Patent Title: Method for cutting electric fuse
- Patent Title (中): 电熔丝切割方法
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Application No.: US12603936Application Date: 2009-10-22
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Publication No.: US08236622B2Publication Date: 2012-08-07
- Inventor: Takehiro Ueda
- Applicant: Takehiro Ueda
- Applicant Address: JP Kanagawa
- Assignee: Renesas Electronics Corporation
- Current Assignee: Renesas Electronics Corporation
- Current Assignee Address: JP Kanagawa
- Agency: Young & Thompson
- Priority: JP2006-130702 20060509
- Main IPC: H01H69/02
- IPC: H01H69/02

Abstract:
A semiconductor device includes an electric fuse formed on a semiconductor substrate and composed of an electric conductor. The electric fuse includes an upper layer interconnect, a via coupled to the upper interconnect and a lower layer interconnect coupled to the via, which are formed in different layers, respectively, in a condition before cutting the electric fuse, and wherein the electric fuse includes a flowing-out region formed of the electric conductor being flowed toward outside from the second interconnect and a void region formed between the first interconnect and the via or in the via, in a condition after cutting the electric fuse.
Public/Granted literature
- US20100037454A1 METHOD FOR CUTTING ELECTRIC FUSE Public/Granted day:2010-02-18
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