Invention Grant
US08236588B2 Method for manufacturing a multi-wavelength integrated semiconductor laser 失效
多波长集成半导体激光器的制造方法

  • Patent Title: Method for manufacturing a multi-wavelength integrated semiconductor laser
  • Patent Title (中): 多波长集成半导体激光器的制造方法
  • Application No.: US12158648
    Application Date: 2006-12-14
  • Publication No.: US08236588B2
    Publication Date: 2012-08-07
  • Inventor: Mamoru MiyachiYoshinori Kimura
  • Applicant: Mamoru MiyachiYoshinori Kimura
  • Applicant Address: JP Tokyo
  • Assignee: Pioneer Corporation
  • Current Assignee: Pioneer Corporation
  • Current Assignee Address: JP Tokyo
  • Agency: Arent Fox LLP
  • Priority: JP2005-366616 20051220
  • International Application: PCT/JP2006/324924 WO 20061214
  • International Announcement: WO2007/072726 WO 20070628
  • Main IPC: H01S3/063
  • IPC: H01S3/063
Method for manufacturing a multi-wavelength integrated semiconductor laser
Abstract:
An object is to provide a multi-wavelength integrated semiconductor laser device which can reduce variations in emission point distance, can be formed by simplified manufacturing processes, and can provide improve electric characteristics.A first semiconductor laser element 100 having an active layer AL1 for emitting a laser beam of a first wavelength from its light-emitting point X1 and a second semiconductor laser element 200 having an active layer AL2 for emitting a laser beam of a second wavelength from its light-emitting point X2 are bonded to each other via an adhesive layer MC made of metal. At least either one of the semiconductor laser elements has a ridge waveguide made of an n-type semiconductor. The semiconductor laser elements 100 and 200 are bonded via the metal adhesive layer MC at the sides of their respective p-type semiconductors. A submount SUB is bonded to the first semiconductor laser element 100 via metal at a side where its ridge waveguide is formed.
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