Invention Grant
US08236163B2 Anode media for use in electroplating processes, and methods of cleaning thereof 有权
用于电镀工艺的阳极介质及其清洁方法

Anode media for use in electroplating processes, and methods of cleaning thereof
Abstract:
A method for cleaning anode media, the method comprising removing the anode media from an electroplating system, and removing scale coatings from substrates of the anode media by vibrational polishing the anode media with abrasive particles.
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