Invention Grant
US08234926B2 Pressure sensor with a closed cavity containing an inert filling medium
有权
带有惰性填充介质的封闭腔的压力传感器
- Patent Title: Pressure sensor with a closed cavity containing an inert filling medium
- Patent Title (中): 带有惰性填充介质的封闭腔的压力传感器
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Application No.: US12904871Application Date: 2010-10-14
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Publication No.: US08234926B2Publication Date: 2012-08-07
- Inventor: Christian Wohlgemuth , Peter Thiele
- Applicant: Christian Wohlgemuth , Peter Thiele
- Applicant Address: DE Munich
- Assignee: EPCOS AG
- Current Assignee: EPCOS AG
- Current Assignee Address: DE Munich
- Agency: Slater & Matsil, L.L.P.
- Priority: DE102008021091 20080428
- Main IPC: G01L13/02
- IPC: G01L13/02 ; G01L15/00

Abstract:
A pressure sensor has a substrate with conductor tracks for contact-connecting electrical components. The pressure sensor has a measuring element for converting a mechanical measurement variable into an electrical signal and a signal converter for processing the electrical signals from the measuring element further. Furthermore, the pressure sensor has a first diaphragm which, together with the substrate, forms a first closed cavity which contains an inert filling medium. At least one side of the measuring element of the pressure sensor, which comprises an active surface, has direct contact with the filling medium in the first cavity. The signal converter is arranged on the substrate in the form of an unhoused integrated circuit.
Public/Granted literature
- US20110083513A1 Pressure Sensor Public/Granted day:2011-04-14
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