Invention Grant
US08193900B2 Method for fabricating metal gate and polysilicon resistor and related polysilicon resistor structure
有权
制造金属栅极和多晶硅电阻器及相关多晶硅电阻器结构的方法
- Patent Title: Method for fabricating metal gate and polysilicon resistor and related polysilicon resistor structure
- Patent Title (中): 制造金属栅极和多晶硅电阻器及相关多晶硅电阻器结构的方法
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Application No.: US12490334Application Date: 2009-06-24
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Publication No.: US08193900B2Publication Date: 2012-06-05
- Inventor: Cheng-Wen Fan , Kun-Szu Tseng , Che-Hua Hsu , Chih-Yu Tseng , Victor-Chiang Liang
- Applicant: Cheng-Wen Fan , Kun-Szu Tseng , Che-Hua Hsu , Chih-Yu Tseng , Victor-Chiang Liang
- Applicant Address: TW Science-Based Industrial Park, Hsin-Chu
- Assignee: United Microelectronics Corp.
- Current Assignee: United Microelectronics Corp.
- Current Assignee Address: TW Science-Based Industrial Park, Hsin-Chu
- Agent Winston Hsu; Scott Margo
- Main IPC: H01C1/012
- IPC: H01C1/012

Abstract:
An integrated method includes fabricating a metal gate and a polysilicon resistor structure. A photoresistor layer is defined by an SAB photo mask and covers a part of a polysilicon structure of the polysilicon resistor. When the gate conductor of a poly gate transistor is etched, the part of the polysilicon structure is protected by the patterned photoresistor layer. After the polysilicon resistor and the metal gate are formed. The polysilicon resistor still has sufficient resistance and includes two metal structures for electrical connection.
Public/Granted literature
- US20100328022A1 METHOD FOR FABRICATING METAL GATE AND POLYSILICON RESISTOR AND RELATED POLYSILICON RESISTOR STRUCTURE Public/Granted day:2010-12-30
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