Invention Grant
- Patent Title: Recessed workfunction metal in CMOS transistor gates
- Patent Title (中): CMOS晶体管栅极中嵌入的功函数金属
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Application No.: US11431388Application Date: 2006-05-09
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Publication No.: US08193641B2Publication Date: 2012-06-05
- Inventor: Willy Rachmady , Brian McIntyre , Michael K. Harper , Subhash M. Joshi
- Applicant: Willy Rachmady , Brian McIntyre , Michael K. Harper , Subhash M. Joshi
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agent Rahul D. Engineer
- Main IPC: H01L23/48
- IPC: H01L23/48 ; H01L23/52 ; H01L29/40

Abstract:
A transistor gate comprises a substrate having a pair of spacers disposed on a surface, a high-k dielectric conformally deposited on the substrate between the spacers, a recessed workfunction metal conformally deposited on the high-k dielectric and along a portion of the spacer sidewalls, a second workfunction metal conformally deposited on the recessed workfunction metal, and an electrode metal deposited on the second workfunction metal. The transistor gate may be formed by conformally depositing the high-k dielectric into a trench between the spacers on the substrate, conformally depositing a workfunction metal atop the high-k dielectric, depositing a sacrificial mask atop the workfunction metal, etching a portion of the sacrificial mask to expose a portion of the workfunction metal, and etching the exposed portion of the workfunction metal to form the recessed workfunction metal. The second workfunction metal and the electrode metal may be deposited atop the recessed workfunction metal.
Public/Granted literature
- US20070262451A1 Recessed workfunction metal in CMOS transistor gates Public/Granted day:2007-11-15
Information query
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