Invention Grant
- Patent Title: Support with integrated deposit of gas absorbing material for manufacturing microelectronic, microoptoelectronic or micromechanical devices
- Patent Title (中): 支持用于制造微电子,微电子或微机电器件的气体吸收材料的集成沉积
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Application No.: US11657703Application Date: 2007-01-23
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Publication No.: US08193623B2Publication Date: 2012-06-05
- Inventor: Marco Amiotti
- Applicant: Marco Amiotti
- Applicant Address: IT Lainate (Milan)
- Assignee: SAES Getters S.p.A.
- Current Assignee: SAES Getters S.p.A.
- Current Assignee Address: IT Lainate (Milan)
- Agency: TIPS Group
- Priority: ITMI2001A1557 20010720; ITMI2002A0689 20020402
- Main IPC: H01L23/20
- IPC: H01L23/20

Abstract:
The specification teaches a device for use in the manufacturing of microelectronic, microoptoelectronic or micromechanical devices (microdevices) in which a contaminant absorption layer improves the life and operation of the microdevice. In a preferred embodiment the invention includes a mechanical supporting base, and a layer of a gas absorbing or purifier material is deposited on the base by a variety of techniques and a layer for temporary protection of the purification material is placed on top of the purification material. The temporary protection material is compatible for use in the microdevice and can be removed during the manufacture of the microdevice.
Public/Granted literature
Information query
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