Invention Grant
- Patent Title: Method for exciting a mobile element of a microstructure
- Patent Title (中): 用于激发微结构的移动元件的方法
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Application No.: US12817252Application Date: 2010-06-17
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Publication No.: US08193492B2Publication Date: 2012-06-05
- Inventor: Henri Blanc
- Applicant: Henri Blanc
- Applicant Address: FR Paris
- Assignee: Commissariat a l'Energie Atomique et aux Energies Alternatives
- Current Assignee: Commissariat a l'Energie Atomique et aux Energies Alternatives
- Current Assignee Address: FR Paris
- Agency: Occhiuti Rohlicek & Tsao LLP
- Priority: FR0902954 20090618
- Main IPC: H03L1/00
- IPC: H03L1/00
Abstract:
The invention pertains to a method for exciting a resonant element of a microstructure, this element being mobile according to one degree of freedom. The method comprises a step for applying a charged particle beam to said microstructure, the beam being configured so as to drive the element in an alternating motion depending on its degree of freedom.
Public/Granted literature
- US20100320383A1 METHOD FOR EXCITING A MOBILE ELEMENT OF A MICROSTRUCTURE Public/Granted day:2010-12-23
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