Invention Grant
- Patent Title: Uniform temperature heater
- Patent Title (中): 均匀温度加热器
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Application No.: US12366733Application Date: 2009-02-06
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Publication No.: US08193473B2Publication Date: 2012-06-05
- Inventor: Yutaka Unno
- Applicant: Yutaka Unno
- Applicant Address: JP Nagoya
- Assignee: NGK Insulators, Ltd.
- Current Assignee: NGK Insulators, Ltd.
- Current Assignee Address: JP Nagoya
- Agency: Burr & Brown
- Main IPC: H05B3/68
- IPC: H05B3/68 ; C23C16/00

Abstract:
A heating unit includes: a base having an upper surface; a first heating element buried in an upper part of the base, the upper part including the upper surface, the first heating element having a flat shape almost parallel to the upper surface; and a second heating element buried in a lower part of the base and arranged in a location lower than the first heating element with respect to the upper surface, the lower part being joined to the upper part, and the second heating element having a flat shape. First and second projection patterns have an overlapping portion where the first projection pattern and the second projection pattern partially overlap each other, the first projection pattern representing the first heating element projected on the upper surface of the base, and the second projection pattern representing the second heating element projected the upper surface of the base.
Public/Granted literature
- US20090200289A1 HEATING UNIT Public/Granted day:2009-08-13
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