Invention Grant
US08193025B2 Photomask, image sensor, and method of manufacturing the image sensor
失效
光掩模,图像传感器和图像传感器的制造方法
- Patent Title: Photomask, image sensor, and method of manufacturing the image sensor
- Patent Title (中): 光掩模,图像传感器和图像传感器的制造方法
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Application No.: US12241263Application Date: 2008-09-30
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Publication No.: US08193025B2Publication Date: 2012-06-05
- Inventor: Jin Ho Park
- Applicant: Jin Ho Park
- Applicant Address: KR Seoul
- Assignee: Dongbu Hitek Co., Ltd.
- Current Assignee: Dongbu Hitek Co., Ltd.
- Current Assignee Address: KR Seoul
- Agency: Saliwanchik, Lloyd & Eisenschenk
- Priority: KR10-2007-0132394 20071217
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
Provided are a photomask, an image sensor, and a method of manufacturing the image sensor. The image sensor can include photodiode structures, color filters, a planarization layer, and microlenses. The photodiode structures can be disposed on a semiconductor substrate according to unit pixel. The color filters can be disposed on the semiconductor substrate in a matrix arrangement above the photodiode structures. The planarization layer can cover the entire semiconductor substrate and includes cavities in regions of the planarization layer corresponding to boundaries between the color filters. The cavities may be arranged at boundaries between unit pixels. The microlenses can be disposed on the planarization layer such that portions of the microlenses are arranged in the cavities of the planarization layer.
Public/Granted literature
- US20090152660A1 Photomask, Image Sensor, and Method of Manufacturing the Image Sensor Public/Granted day:2009-06-18
Information query
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