Invention Grant
- Patent Title: Deposition apparatus
- Patent Title (中): 沉积装置
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Application No.: US11637375Application Date: 2006-12-11
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Publication No.: US08192546B2Publication Date: 2012-06-05
- Inventor: Hun Kim , Jin-Woo Park
- Applicant: Hun Kim , Jin-Woo Park
- Applicant Address: KR Yongin
- Assignee: Samsung Mobile Display Co., Ltd.
- Current Assignee: Samsung Mobile Display Co., Ltd.
- Current Assignee Address: KR Yongin
- Agency: Christie, Parker & Hale, LLP
- Priority: KR10-2005-0124378 20051216
- Main IPC: C23C16/00
- IPC: C23C16/00

Abstract:
A deposition apparatus including: a chamber; a mask assembly including a mask arranged to deposit a material on a substrate included in the chamber and a mask frame for supporting the mask; and a magnet unit including a first magnet unit which contacts (or adheres or chucks or secures) the mask assembly to the substrate by magnetic force; and a second magnet unit corresponding to the mask frame, in order to ensure that the mask more closely contacts the substrate.
Public/Granted literature
- US20070137571A1 Deposition apparatus Public/Granted day:2007-06-21
Information query
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