Invention Grant
- Patent Title: Pressure control system of wafer polishing apparatus
- Patent Title (中): 晶圆抛光装置的压力控制系统
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Application No.: US12458303Application Date: 2009-07-08
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Publication No.: US08192251B2Publication Date: 2012-06-05
- Inventor: Yueh Cheng Hsueh , Chin Wei Wu , Sheng-Feng Hung
- Applicant: Yueh Cheng Hsueh , Chin Wei Wu , Sheng-Feng Hung
- Applicant Address: TW Taoyuan County
- Assignee: Inotera Memories, Inc.
- Current Assignee: Inotera Memories, Inc.
- Current Assignee Address: TW Taoyuan County
- Agency: Rosenberg, Klein & Lee
- Priority: TW98103972A 20090206
- Main IPC: G05D16/20
- IPC: G05D16/20 ; B24B51/00

Abstract:
A pressure control system of a wafer polishing apparatus includes a main input air pressure regulator, an air branch conduit, a plurality of first pipes, a plurality of auxiliary air pressure regulators, a plurality of second pipes, and a plurality of air pressure controlling devices. The air branch conduit is connected with the main input air pressure regulator. The first pipes are connected between the air branch conduit and the auxiliary air pressure regulators. The second pipes are connected between the auxiliary air pressure regulators and the air pressure controlling devices. Accordingly, the air pressure controlling devices can control the pressure outputted from a polishing head of the wafer polishing apparatus to a surface of a wafer.
Public/Granted literature
- US20100203807A1 Pressure control system of wafer polishing apparatus Public/Granted day:2010-08-12
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