Invention Grant
- Patent Title: Measuring instrument
- Patent Title (中): 测量仪器
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Application No.: US12494954Application Date: 2009-06-30
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Publication No.: US08191408B2Publication Date: 2012-06-05
- Inventor: Shiro Igasaki , Masaoki Yamagata
- Applicant: Shiro Igasaki , Masaoki Yamagata
- Applicant Address: JP Kawasaki-shi
- Assignee: Mitutoyo Corporation
- Current Assignee: Mitutoyo Corporation
- Current Assignee Address: JP Kawasaki-shi
- Agency: Rankin, Hill & Clark LLP
- Priority: JP2008-172334 20080701
- Main IPC: G01B5/26
- IPC: G01B5/26

Abstract:
A surface texture measuring instrument includes a contact piece to be in contact with an object, a sensor driving mechanism that moves the contact piece along the surface of the object, a controller that controls the sensor mechanism, and a force sensor that detects a measuring force exerted on the contact piece when the contact piece is brought into contact with the object. The controller includes a target value output that outputs a target value of the measuring force, a feedback controller that performs feedback control of the sensor driving mechanism based on a deviation between the measuring force and the target value, and a feedback compensator provided on the feedback controller. The feedback compensator performs feedback compensation in accordance with the measuring force.
Public/Granted literature
- US20100000307A1 MEASURING INSTRUMENT Public/Granted day:2010-01-07
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