Invention Grant
- Patent Title: Method for providing a structure in a magnetic transducer
- Patent Title (中): 在磁换能器中提供结构的方法
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Application No.: US12470385Application Date: 2009-05-21
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Publication No.: US08191237B1Publication Date: 2012-06-05
- Inventor: Guanghong Luo , Ge Yi , Dujiang Wan , Lei Wang , Xiaohai Xiang , Ming Jiang
- Applicant: Guanghong Luo , Ge Yi , Dujiang Wan , Lei Wang , Xiaohai Xiang , Ming Jiang
- Applicant Address: US CA Fremont
- Assignee: Western Digital (Fremont), LLC
- Current Assignee: Western Digital (Fremont), LLC
- Current Assignee Address: US CA Fremont
- Main IPC: G11B5/127
- IPC: G11B5/127 ; H04R31/00

Abstract:
A method for providing a structure in a magnetic transducer is described. The method includes performing a first planarization that exposes a top surface of the magnetic transducer. This first planarization also terminates before a portion of a first planarization buffer layer is removed. The method also includes providing a second planarization buffer layer after the first planarization is performed. The second planarization buffer layer is above the first planarization buffer layer. The method also includes performing a second planarization. This second planarization does not completely remove the second planarization buffer layer. The method also includes performing a third planarization terminating after the first planarization buffer layer is exposed and before the first planarization buffer layer is completely removed.
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