Invention Grant
- Patent Title: Microelectromechanical system
- Patent Title (中): 微机电系统
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Application No.: US12475392Application Date: 2009-05-29
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Publication No.: US08174342B2Publication Date: 2012-05-08
- Inventor: Tang Min , Liao Ebin , Giuseppe Noviello , Francesco Italia
- Applicant: Tang Min , Liao Ebin , Giuseppe Noviello , Francesco Italia
- Applicant Address: CH Geneva
- Assignee: STMicroelectronics NV
- Current Assignee: STMicroelectronics NV
- Current Assignee Address: CH Geneva
- Agency: Hogan Lovells US LLP
- Main IPC: H01P1/10
- IPC: H01P1/10 ; H01H55/00

Abstract:
The invention relates to microelectromechanical systems (MEMS), and more particularly, to MEMS switches using magnetic actuation. The MEMS switch may be actuated with no internal power consumption. The switch is formed in an integrated solid state MEMS technology. The MEMS switch is micron and/or nanoscale, very reliable and accurate. The MEMS switch can be designed into various architectures, e.g., a cantilever architecture and torsion architecture. The torsion architecture is more efficient than a cantilever architecture.
Public/Granted literature
- US20100171575A1 MICROELECTROMECHANICAL SYSTEM Public/Granted day:2010-07-08
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