Invention Grant
US08170827B2 Drop mass deviation measuring apparatus, drop mass deviation measuring method of the same, pattern forming system using the same, and control method of the pattern forming system using the same
失效
液滴质量偏差测量装置,液滴质量偏差测量方法,使用其的图案形成系统以及使用其的图案形成系统的控制方法
- Patent Title: Drop mass deviation measuring apparatus, drop mass deviation measuring method of the same, pattern forming system using the same, and control method of the pattern forming system using the same
- Patent Title (中): 液滴质量偏差测量装置,液滴质量偏差测量方法,使用其的图案形成系统以及使用其的图案形成系统的控制方法
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Application No.: US12222602Application Date: 2008-08-12
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Publication No.: US08170827B2Publication Date: 2012-05-01
- Inventor: Chong Uck Kim , Hyuk Kim , Sano Jin Choi , Seong Wook Cheong , Eun Seon Lim , Byung Il Ahn , Joong He Lee
- Applicant: Chong Uck Kim , Hyuk Kim , Sano Jin Choi , Seong Wook Cheong , Eun Seon Lim , Byung Il Ahn , Joong He Lee
- Applicant Address: KR Suwon-Si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-Si
- Agency: Staas & Halsey LLP
- Priority: KR10-2007-0136629 20071224
- Main IPC: G01G19/00
- IPC: G01G19/00

Abstract:
A drop mass deviation measuring apparatus, a drop mass deviation measuring method, a pattern forming system, and a control method measure mass deviations of drops discharged from a plurality of drop discharge units in real time with high precision. The apparatus utilizes a plurality of drops discharged from a plurality of drop discharge units, a drop moving force providing part to provide moving forces, having directions different from discharge directions of each of the plurality of drops, to the plurality of drops, a discharged drop position detection member to acquire drop position images individually reflecting the a position of each of the plurality of drops, and a drop mass deviation measurement control part to calculate a drop discharge direction separation angle of each of the plurality of drops using the drop position images acquired by the discharged drop position detection member to measure mass deviation of each of the drops.
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