Invention Grant
US08169595B2 Optical apparatus and method for modifying the imaging behavior of such apparatus
有权
用于修改这种装置的成像行为的光学装置和方法
- Patent Title: Optical apparatus and method for modifying the imaging behavior of such apparatus
- Patent Title (中): 用于修改这种装置的成像行为的光学装置和方法
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Application No.: US12357126Application Date: 2009-01-21
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Publication No.: US08169595B2Publication Date: 2012-05-01
- Inventor: Martin Schriever , Ulrich Wegmann , Stefan Hembacher , Bernhard Geuppert , Juergen Huber , Norbert Kerwien , Michael Totzeck , Markus Hauf
- Applicant: Martin Schriever , Ulrich Wegmann , Stefan Hembacher , Bernhard Geuppert , Juergen Huber , Norbert Kerwien , Michael Totzeck , Markus Hauf
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Priority: DE102006034755 20060724
- Main IPC: G03B27/72
- IPC: G03B27/72 ; G03B27/54
Abstract:
The disclosure relates to an optical apparatus including a light source that emits light in the form of light pulses having a pulse frequency, and including at least one optical element. The disclosure also relates to a projection exposure machine including a pulsed light source and a projection objective, and to a method for modifying the imaging behavior of such an apparatus, such as in a projection exposure machine.
Public/Granted literature
- US20090174876A1 OPTICAL APPARATUS AND METHOD FOR MODIFYING THE IMAGING BEHAVIOR OF SUCH APPARATUS Public/Granted day:2009-07-09
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