Invention Grant
US08169084B2 Bond pad structure and method for producing same 有权
焊盘结构及其制造方法

  • Patent Title: Bond pad structure and method for producing same
  • Patent Title (中): 焊盘结构及其制造方法
  • Application No.: US12514269
    Application Date: 2007-11-12
  • Publication No.: US08169084B2
    Publication Date: 2012-05-01
  • Inventor: Bengt PhilippsenHans-Joerg Klammer
  • Applicant: Bengt PhilippsenHans-Joerg Klammer
  • Applicant Address: NL Eindhoven
  • Assignee: NXP B.V.
  • Current Assignee: NXP B.V.
  • Current Assignee Address: NL Eindhoven
  • Priority: EP06123956 20061113
  • International Application: PCT/IB2007/054591 WO 20071112
  • International Announcement: WO2008/059433 WO 20080522
  • Main IPC: H01L29/41
  • IPC: H01L29/41
Bond pad structure and method for producing same
Abstract:
It is described a bond pad structure and a method for producing the same, the bond pad structure (1), comprising: a substrate (3) having a surface (17) to be electrically contacted; a first isolator layer (5) contacting the surface (17) of the substrate in a first region (a); a first metal layer (9) contacting the surface (17) of the substrate (3) in a second region (b) adjacent the first region (a) and partly overlapping the first isolator layer (5); a second isolator layer (11) at least partly overlapping the first isolator layer (5) and the first metal layer (9); a second metal layer (13) at least partly overlapping the second isolator layer (11) in the second region (b); wherein a maximum thickness (U) of the second metal layer (13) perpendicular to the surface (17) of the substrate (3) is smaller than a maximum thickness (t0) of the first isolator layer (5) perpendicular to the surface (17) of the substrate (3). The surface of the second isolator layer forming the highest level provides scratching protection for the bond pad structure.
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