Invention Grant
- Patent Title: Semiconductor memory device and production method thereof
- Patent Title (中): 半导体存储器件及其制造方法
-
Application No.: US12881554Application Date: 2010-09-14
-
Publication No.: US08169030B2Publication Date: 2012-05-01
- Inventor: Fujio Masuoka , Shintaro Arai
- Applicant: Fujio Masuoka , Shintaro Arai
- Applicant Address: SG Peninsula Plaza
- Assignee: Unisantis Electronics Singapore Pte Ltd.
- Current Assignee: Unisantis Electronics Singapore Pte Ltd.
- Current Assignee Address: SG Peninsula Plaza
- Agency: Brinks Hofer Gilson & Lione
- Priority: JP2009-211300 20090914
- Main IPC: H01L27/088
- IPC: H01L27/088

Abstract:
In a static memory cell composed of four MOS transistors, the transistors composing a memory cell are formed on a substrate and have a drain, gate, and source arranged vertically with the gate surrounding a columnar semiconductor layer. In this memory cell, the first diffusion layers (second diffusion layers) functioning as a first memory node (second memory node) are connected via a first silicide layer (second silicide layer) formed on their surfaces, whereby an SRAM cell having a small area is realized. Furthermore, a first anti-leak diffusion layer (second anti-leak diffusion layer) having the conductivity type opposite to the first well is formed between the first well and the first diffusion layer (second diffusion layer) having the same conductivity type as the first well so as to prevent leak to the substrate.
Public/Granted literature
- US20110062523A1 SEMICONDUCTOR MEMORY DEVICE AND PRODUCTION METHOD THEREOF Public/Granted day:2011-03-17
Information query
IPC分类: